TEX E.G

Wafer PrWafer Pre-Aligner

Measure

Wafer PrWafer Pre-Aligner orientation flat aligne

Carries

Cools

Project development commodity

MEASURES

Wafer PrWafer Pre-Aligner WA-8A+WA-12A

High speed type / non-contact type / built-in controller / compact design / one-chuck system / various sizes supported (up to 12 inches / 300 mm), corresponding to chipping inspection

Product Features

  • It supports various sizes of wafers (up to 12 inches / 300 mm) .
  • It is a “one-chuck” system that leaves only one chuck mark.
  • We are ready to meet various customer demands for the exterior colors / materials.
  • Chuck materials are available in PEEK (black).
  • It also corresponds to chipping inspection (8-inch type only / additional specification).
  • It’s a high speed type device processing time of 5 seconds.

Product specification

WA-8A

WA-12A

Wafer
  CAD CAD
(inch) φ4, 5, 6, 8 φ8, 12
(mm) 100, 125, 150, 200 200, 300
Size (W×D×H mm) (mm) 200×240×215 200×290×215
Weight (approx.) 8Kg 9Kg
Resolving Orientation: radial 0.0125mm, angle 0.03°
Accuracy Orientation: radial 0.100mm, angle 0.1°
Correspondence RS232C
Designation Angle 0 ~ 360°
Process 8inch Type:Max 6sec., Normal about 5sec., Reset 1 sec.
Power AC 100V ・ 50/60Hz ・ 2A
Vacuum Power -66.5 kPa ( -500mmHg )or less.
Center Adjust ±5mm or less
Body Cover Mirror finished.
Dec,2011.
print

We are ready for design change according to your request.
Please feel free to inquire.
E-mail :info@texeg.co.jp