High speed type / non-contact type / built-in controller / compact design / one-chuck system / various sizes supported (up to 12 inches / 300 mm), corresponding to chipping inspection
- It supports various sizes of wafers (up to 12 inches / 300 mm) .
- It is a “one-chuck” system that leaves only one chuck mark.
- We are ready to meet various customer demands for the exterior colors / materials.
- Chuck materials are available in PEEK (black).
- It also corresponds to chipping inspection (8-inch type only / additional specification).
- It’s a high speed type device processing time of 5 seconds.
|(inch)||φ4, 5, 6, 8||φ8, 12|
|(mm)||100, 125, 150, 200||200, 300|
|Size (W×D×H mm)||（mm）||200×240×215||200×290×215|
|Resolving||Orientation: radial 0.0125mm, angle 0.03°|
|Accuracy||Orientation: radial 0.100mm, angle 0.1°|
|Designation Angle||0 ～ 360°|
|Process||8inch Type:Max 6sec., Normal about 5sec., Reset 1 sec.|
|Power||AC 100V ・ 50/60Hz ・ 2A|
|Vacuum Power||-66.5 kPa ( -500mmHg )or less.|
|Center Adjust||±5mm or less|
|Body Cover||Mirror finished.|