MEASURES

Wafer PrWafer Pre-Aligner WA-8A+WA-12A

High speed type / non-contact type / built-in controller / compact design / one-chuck system / various sizes supported (up to 12 inches / 300 mm), corresponding to chipping inspection

Product Features

Product specification

WA-8A

WA-12A

Wafer
(inch) φ4, 5, 6, 8 φ8, 12
(mm) 100, 125, 150, 200 200, 300
Size (W×D×H mm) (mm) 200×240×215 200×290×215
Weight (approx.) 8Kg 9Kg
Resolving Orientation: radial 0.0125mm, angle 0.03°
Accuracy Orientation: radial 0.100mm, angle 0.1°
Correspondence RS232C
Designation Angle 0 ~ 360°
Process 8inch Type:Max 6sec., Normal about 5sec., Reset 1 sec.
Power AC 100V ・ 50/60Hz ・ 2A
Vacuum Power -66.5 kPa ( -500mmHg )or less.
Center Adjust ±5mm or less
Body Cover Mirror finished.
Dec,2011.