Integrated model combined with chamber and Power supply.
It is applicable to diffusion of semiconductor process, various test materials of steam pressure in CVD gas, temperature maintaining of materials and parts, bench test, etc.
- Self-diagnosis system for control temperature (upper and lower limit) and Level alarm.
- Controllable setting form power consumption until precise temperature control based on electronical cooling/heating system.
- Setting Range for temperature: 15~30℃ (0.01℃ per unit).
- Measuring Range for temperature: 10~35℃.