| Wafer size (changed using an external signal) | φ 4, 5, 6, 8 (inch) 100, 125, 150, 200 (mm) |
|---|---|
| Outside dimensions (width × depth × height) | W 200 mm × H 240 mm × D 215 mm |
| Body weight | Approx. 8 kg |
| Resolution | Diameter direction 0.0125 mm, angle 0.03° |
| Accuracy | Diameter direction 0.100 mm, angle 0.1° |
| Communication function | RS232C |
| Orientation flat angle specification | 0 to 360° |
| Processing time | 8-inch silicon wafer maximum 6 sec, normal approx. 5 sec, reset 1 sec |
| Power supply | 100VAC • 50/60Hz • 2A |
| Vacuum source | -66.5 kPa (-500 mmHg) or less |
| Wafer center correction | ±5 mm or less |
| Body cover | Polished SUS |
TEMPERATURE CONTROLLING
CARRIES & MESURES
PRODUCTS LIST
- Smart home Intelligent Home Temperature Controllable Device PORT
- COVID-19 Vaccine transport storage Electric cool box
- Wall-mounted refrigerator TEXY10
- Assembled-Type Peltier Thermostat
- COVID-19 Vaccine Compact transport storage Electric cool box
- Photomask Transport System
- Pre-Alignment Unit (WA Series)
NEWS
COMPANY
PRODUCTS INFORMATION
What is a pre-alignment system?
The Pre Aligner Unit WA Series is a unit that centers the silicon wafers during transport. TEX E.G. makes maximum use of its proprietary technology for detecting the wafer edge. The accuracy of this is within ±0.05 mm. This makes it possible to handle products not supported by the products of other companies and specialized equipment can be manufactured to meet diversified needs.
Product Features
- Supports 4, 5, 6, 8, and 12 inches wafers.
- This unit uses CMOS sensors to measure the wafer edge. The wafer center is centered at an accuracy of ±0.05 mm.
- The compact design allows for the effective use of space.
《 Silicon Wafers 》
Wafer Pre Aligner - Wa Series
Product Specifications
PRODUCTS INFORMATION
Photomask Transport System
TEMPERATURE CONTROL
TRANSPORT SYSTEM
TECHNOLOGY
CONTACT
We provide customization and can change specifications and technical applications to meet customer requests. Please consult with us.
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