Wafer Pre Aligner - Wa Series

What is a pre-alignment system?

The Pre Aligner Unit WA Series is a unit that centers the silicon wafers during transport. TEX E.G. makes maximum use of its proprietary technology for detecting the wafer edge. The accuracy of this is within ±0.05 mm. This makes it possible to handle products not supported by the products of other companies and specialized equipment can be manufactured to meet diversified needs.

Product Features

  • Supports 4, 5, 6, 8, and 12 inches wafers.
  • This unit uses CMOS sensors to measure the wafer edge. The wafer center is centered at an accuracy of ±0.05 mm.
  • The compact design allows for the effective use of space.

《 Silicon Wafers 》

Wafer Pre Aligner - Wa Series

Product Specifications


Photomask Transport System


We provide customization and can change specifications and technical applications to meet customer requests. Please consult with us.

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