PRODUCTS INFORMATION

What is photomask transport?

Photomasks are used to produce liquid crystal displays and organic EL displays. As these have become larger in recent years, they can no longer be easily transported by people and so assist arms were developed to help transport them. Using them allows large and heavy photomasks to be correctly and safely transported between the manufacturing processes where they are required.

Product Features

Provide the accuracy required for transport to inspection and measurement equipment.
The main areas are made more compact to allow the position to be known and checked to provide excellent operability.
This is an assisting device, so there is no need to enclose it like a robot and it can be installed with existing equipment.
It can also support automated transport.
Peripheral equipment can also be built around the assist arm to create devices for packaging and shipping products.

Assist arm (standard model/center standard type)

Mask Loading/Unloading System（ MCS ）

Path

Mask Rotating Device（ MRD ）

Photomask Transport

The mask loader/unloader system is used to remove the photomask from the case and load it into the equipment. The assist arm is used to remove the mask. The photomask can also be stored in the case. The assist arm can be used for loading and unloading for a variety of production equipment in addition to the mask loader/unloader system.

Operation is simple. First, the assist arm handle is used to set the arm in the mask loader/unloader system positioning unit and catcher. The operator then conducts operation following the instruction displayed on the assist arm monitor.

Assist Arm Movement

Remove the assist arm from the production equipment or mask loader/unloader system and then move the stored photomask to the next transport destination.

The assist arm can be easily transported by one person along the highly accurately set path.

Product Explanation	The assist arm is an assist device for safely and correctly transporting photomasks used in the production of liquid crystal and organic EL displays, which have become quite large in recent years. The operator can perform the operation following the instructions on the assist arm monitor to lessen the burden of operation. Further, in addition to the standard model, we also offer a center standard type with a larger bottom claw operation range that can be selected to match the specifications of the production equipment.
Basic Specifications	(1) Transported mask size X direction = 800 mm (Min.) to 1550 mm (Max.) Y direction = 500 mm (Min.) to 1500 mm (Max.) Thickness = 5 mm (Min.) to 13 mm (Max.)
Hand	(1) Hand Shape　● One 60 mm wide mask clamp claw is placed in the center of the bottom aide of the mask and two 30 mm wide claws are placed on the right 　 and left sides on the top of the mask. (2) Clamp/Unclamp Method The top and bottom claws are moved by independent motors and the top claws clamp onto the mask at a set torque. (3) Top claw drive = Servo motor + Clean actuator (Ball screw) (4) Top claw vertical stroke = 1050 mm (5) Bottom claw drive = Servo motor + Ball screw (6) Bottom claw vertical stroke = 30 m (7) Mask clamp claw material (mask contact area) = Black Delrin The black Delrin mount is a side type that is held by screws.
Tilt Area	(1) Comes with a touch panel for basic operations (conditions menus selection, etc.). (2) The person operated hand employs an orientation control handle. 　Comes with a close at hand switch for transporting while the mask is grasped. (3) Comes with a hood to protect the equipment from the dust coming off of people. (4) Comes with an emergency stop switch.
Controller	(1) PLC controller (Made by Mitsubishi Electric) (2) Equipped a rotating warning light (with a buzzer)
Arm	(1) The configuration is rotating part → Z-axis part → 1st arm → 2nd arm. (2) Equipped with a weight for offsetting the arm and hand as a cylinder or 　 electro-pneumatic regulator is not used. (3) Rotating stroke = 316° (4) Z-axis stroke = 840 mm (5) Z-axis operation method = Ball screw + Servo motor (6) The 1st arm and 2nd arm joints are equipped with an electromagnetic brake to support the push back force when tilting the mask. A switch is used to operate the brake
Tilt Driver	(1) Stroke = 19° (2) Drive method = Ball screw + Servo motor
Rolling mechanism	(1) Stoke = Approx. ± 0.2° (2) Drive method = Eccentric cam + Servo motor
Safety Measures and Debris Countermeasures	(1) The weight of the Z-axis moving part is offset by a weight. This makes possible 　 movement with little torque. (2) A safety bumper operates and the motor is stopped when another part is accidentally 　 impacted when the assist arm is set in the catcher (during Z-axis operation). (3) A close at hand switch is used for all handover operations after conditions selection (transport unit, mask size, sheet thickness, material, etc.). In addition, the handover can be performed by pressing the switches in the order that 　they flash. (4) If a problem is discovered during device operation (check by a person), it is possible to reverse operation from that state. (5) Cleanroom measures are taken for the drive units of the upper and lower claws of the 　hand where a vacuum pump sucks up debris within the drive units. (6) Products for clean operation are used to grease the ball screw and LM guide and 　　　 excess oil is wiped away. (7) The assist arm lock mechanism is designed not to generate debris.
Other functions	(1)The hand servo driver is placed at the top so as not to block the field of view. In addition, it also has a cover to prevent dust generation. (2)The tilt operation for mask handover can only be operated while the switched is 　pressed and stops when the switch is released.

Product Explanation	The assist arm is an assist device for safely and correctly transporting photomasks for liquid crystal displays and organic EL displays, which have become large in recent years, to the production equipment. The operator can perform operations while following the assist arm monitor instruction to reduce the burden of operation. With the center standard type the operation range of the bottom claw can be increased to match the specifications of the production equipment.
Basic Specifications	(1) Transported mask size X direction = 800 mm (Min.) to 1550 mm (Max.) Y direction = 500 mm (Min.) to 1500 mm (Max.) Thickness = 5 mm (Min.) to 13 mm (Max.)
Hand	(1) Hand Shape ● One 60 mm wide mask clamp claw is placed in the center of the bottom aide of the mask and two 30 mm wide claws are placed on the right and left sides on the top of the mask. (2) Clamp/Unclamp Method The top and bottom claws are moved by independent motors and the top claws clamp onto the mask at a set torque. (3) Top claw drive = Servo motor + Clean actuator (Ball screw) (4) Top claw vertical stroke = 1050 mm (5) Bottom claw drive = Servo motor + Ball screw (6) Bottom claw vertical stroke = 30 m (7) Mask clamp claw material (mask contact area) = Black Delrin The black Delrin mount is a side type that is held by screws.
Tilt Area	(1) Comes with a touch panel for basic operations (conditions menus selection, etc.). (2) The person operated hand employs an orientation control handle. Comes with a close at hand switch for transporting while the mask is grasped. (3) Comes with a hood to protect the equipment from the dust coming off of people. (4) Comes with an emergency stop switch.
Controller	(1) PLC controller (Made by Mitsubishi Electric) (2) Equipped a rotating warning light (with a buzzer)
Arm	(1) The configuration is rotating part → Z-axis part → 1st arm → 2nd arm. (2) Equipped with a weight for offsetting the arm and hand as a cylinder or electro-pneumatic regulator is not used. (3) Rotating stroke = 316° (4) Z-axis stroke = 840 mm (5) Z-axis operation method = Ball screw + Servo motor (6) The 1st arm and 2nd arm joints are equipped with an electromagnetic brake to support the push back force when tilting the mask. A switch is used to operate the brake.
Tilt driver	(1) Stroke = 19° (2) Drive method = Ball screw + Servo motor
Rolling mechanism	(1) Stoke = Approx. ± 0.2° (2) Drive method = Eccentric cam + Servo motor
Safety Measures and Debris Countermeasures	(1) The weight of the Z-axis moving part is offset by a weight. This makes possible movement with little torque. (2) A safety bumper operates and the motor is stopped when another part is accidentally impacted when the assist arm is set in the catcher (during Z-axis operation). (3) A close at hand switch is used for all handover operations after conditions selection (transport unit, mask size, sheet thickness, material, etc.). In addition, the handover can be performed by pressing the switches in the order that they flash. (4) If a problem is discovered during device operation (check by a person), it is possible to reverse operation from that state. (5) Cleanroom measures are taken for the drive units of the upper and lower claws of the hand where a vacuum pump sucks up debris within the drive units. (6) Products for clean operation are used to grease the ball screw and LM guide and excess oil is wiped away. (7) The assist arm lock mechanism is designed not to generate debris.
Other functions	(1)The hand servo driver is placed at the top so as not to block the field of view. In addition, it also has a cover to prevent dust generation. (2)The tilt operation for mask handover can only be operated while the switched is pressed and stops when the switch is released

Product Explanation	The assist arm can move horizontally to allow photomasks to be transported to multiple production equipment and to expand the operation range. The path length can be from 1 to 20 meters and can be set to follow the shape of your factory layout. In addition to straight lines, curved (90 degree) paths can be added to support flexible layouts.
Basic Specifications	(1) Rail length: 1 m to 20 m (2) Width: 590 mm (3) Height: 400 mm (4) Fastening method: Toggle clamp (arranged diagonally in 2 positions) (5) Drive method: Manual (motor drive is also possible) (6) Assist arm fastening base (with AC fan)

Product Explanation

The assist arm can move horizontally to allow photomasks to be transported to multiple production equipment and to expand the operation range. The path length can be from 1 to 20 meters and can be set to follow the shape of your factory layout. In addition to straight lines, curved (90 degree) paths can be added to support flexible layouts.

Basic Specifications

(1) Rail length: 1 m to 20 m

(2) Width: 590 mm

(3) Height: 400 mm

(4) Fastening method: Toggle clamp (arranged diagonally in 2 positions)

(5) Drive method: Manual (motor drive is also possible)

(6) Assist arm fastening base (with AC fan)

Product Explanation	This device removes the glass, which is the photomask material, from the case and loads it onto the production line. It then stores the finished photomask in the case for shipment. This makes it possible to safely handle the photomask using few people. Further, because it supports a range of photomask cases, it can be motorized and taught for each case.
Basic Specifications	(1) Mask size: 800 × 920 × 8t to 1220 × 1400 × 13t (including the 1550 width) (2) Mask case: In accordance with the request and drawings supplied by the customer. However, if the request is received after production has started, only within the handover possible range can be supported.
Fork	(1) The fork is combined with a roller to make it easy to center. (2) Case centering units are attached to the left and right of the fork. A cylinder is used for operation. (3) An AC servo motor is used for fork vertical movement. (4) A cylinder is used to drive the fork tilt at a tilt angle of up to 75 degrees.
Catcher	(1) The catcher is built into the unit. (2) It is stored inside the unit when not used. (3) Drive method ● Catcher: Ball screw + Servo motor ● Catcher body: Motor (This may be changed) (4) A unit for communicating with the assist arm is attached. The assist arm performs the handover operation.
Controller	(1) A PLC is built into the body. (2) A special handy touch panel is used for the MCS. (3) Up to 20 types of cases can be registered. (4) Teaching can be done for multiple locations and for each case. However, case sizes cannot be referenced between assist arms.
Other	(1) Comes with a retraction mechanism for when not used. (2) Comes with a cart for holding the case lid.

Product Explanation	During transport, the front and back can be reversed to match the insertion method set for each device.
Basic Specifications	X direction = 550 mm (Min.) to 1550 mm (Max.) Y direction = 500 mm (Min.) to 1500 mm (Max.) Thickness = 5 mm (Min.) to 13 mm (Max.) Mask clamp standard = Center standard
Mask Clamp	(1) Drive method A servo motor is used to drive the horizontal ball screws for which there is a right screw and left screw. (2) The mask is held by a set pressure by the right and left V rollers. (3) The V roller material is black Delrin. (4) The V rollers support 800 × 945 pellicles.
Inverting unit	(1) The inversion operation is done by hand using bearings. (2) There are sensors that detect the front and back and the unit is held in place by stoppers.
Catcher	(1) Catchers are installed in two locations on the front and back. (2) Drive method = Motor + Ball screw (3) Anteroposterior stroke = 130 mm (4) The two catchers are used linked to one drive.
Other	(1) The operation is performed using the assist arm.

Product Explanation	Many devices are required to manufacture a photomask and these cannot be covered using just one path, so there are multiple production lines. The transport cart carries the photomask to the required equipment in multiple lines. Further, the photomasks can be stored without putting them in cases if multiple carts are employed.
Basic Specifications	X direction = 550 mm (Min.) to 1550 mm (Max.) Y direction = 500 mm (Min.) to 1500 mm (Max.) Thickness = 5 mm (Min.) to 13 mm (Max.) Mask clamp standard = Center standard
Mask Clamp	(1) Drive method Manual: A handle is used to operate the horizontal ball screw which has screws on the right and left. There is a manual brake close to the handle to lock it when the unit is being moved. (2) The V roller material is black Delrin. (3) The V roller supports 800 × 945 pellicles
Catcher	(1) Catchers are installed in two locations. (2) Drive method = Manual (3) Anteroposterior stroke = 130 mm

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